本文關鍵詞： 金屬Ce薄膜 電磁感應加熱 蒸發(fā) 蒸氣密度 蒸氣密度分布　出處：《稀有金屬與硬質合金》2017年04期 　論文類型：期刊論文

【摘要】：通過對金屬Ce蒸發(fā)行為的分析,確定了合適的蒸發(fā)溫度,在此基礎上開展了電磁感應蒸發(fā)裝置的設計及蒸發(fā)技術研究。對金屬Ce蒸發(fā)速率進行了測定,并采用膜厚法分析蒸氣密度分布,稱重法測量了蒸氣密度。結果表明:2 000℃左右金屬Ce蒸發(fā)速率約為99~135g/h,實測值略低于理論值;金屬Ce原子蒸氣密度分布近似為余弦函數(shù)高次冪分布,原子蒸氣密度約為10~(11) atom/cm~3量級。采用電磁感應加熱蒸鍍金屬Ce薄膜具有應用可行性。
[Abstract]:Based on the analysis of the evaporation behavior of metal ce, the suitable evaporation temperature is determined, and the design of the electromagnetic induction evaporation device and the study of evaporation technology are carried out. The evaporation rate of metal ce is measured. The vapor density distribution was analyzed by the film thickness method and the vapor density was measured by the weighing method. The results show that the evaporation rate of ce is about 99 ~ 135g / h at about 2 000 鈩，

本文編號：1507070