【摘要】：超精密加工、測量設(shè)備精度不斷提高，對加工和測量環(huán)境要求也越來越高。地基振動是影響精度的一個重要因素。精密主動隔振臺結(jié)合主動、被動隔振的優(yōu)點，，在實現(xiàn)良好的隔振效果的同時可以獲得更寬的隔振頻帶�？刂葡到y(tǒng)是精密隔振臺的重要組成部分，其性能優(yōu)劣直接影響隔振臺的隔振效果。 本文以單自由度隔振臺為研究對象，分析了單自由度主動隔振臺的工作原理，對單自由度精密主動隔振臺進行了理論建模，在此基礎(chǔ)上設(shè)計了基于PID算法的反饋控制器和基于自適應(yīng)算法的前饋控制器，并對前饋控制器進行了仿真實驗。 根據(jù)隔振系統(tǒng)的控制要求，設(shè)計了控制器總體硬件框架，提出了傳感器模塊、驅(qū)動模塊和控制核心模塊設(shè)計需求，并分別完成了傳感器選型和對應(yīng)信號處理電路設(shè)計，驅(qū)動模塊選型設(shè)計，和控制核心模塊選型設(shè)計。 分析了隔振系統(tǒng)控制軟件設(shè)計需求，選取Windows XPe+RTX作為軟件開發(fā)環(huán)境，設(shè)計了控制軟件總體框架，并從實時驅(qū)動模塊、共享內(nèi)存模塊和人機交互模塊進行了軟件詳細設(shè)計。 最后介紹了實驗臺組成和測試方法，并對控制器和控制系統(tǒng)軟硬件進行了實驗測試。實驗效果表明控制系統(tǒng)設(shè)計滿足控制要求。
[Abstract]:Ultra-precision machining, the accuracy of measuring equipment is improving, and the requirements for machining and measuring environment are getting higher and higher. The vibration of foundation is an important factor affecting the accuracy. Combined with the advantages of active and passive vibration isolation, the precision active vibration isolation table can not only achieve good vibration isolation effect, but also obtain a wider vibration isolation frequency band. The control system is an important part of the precision vibration isolation table, and its performance directly affects the vibration isolation effect of the vibration isolation table. In this paper, taking the single-degree-of-freedom vibration isolation table as the research object, the working principle of the single-degree-of-freedom active vibration isolation table is analyzed, and the theoretical modeling of the single-degree-of-freedom precision active vibration isolation table is carried out. On this basis, the feedback controller based on PID algorithm and the feedforward controller based on adaptive algorithm are designed, and the simulation experiments of feedforward controller are carried out. According to the control requirements of the vibration isolation system, the overall hardware framework of the controller is designed, and the design requirements of the sensor module, the drive module and the control core module are put forward, and the sensor selection and corresponding signal processing circuit design are completed respectively. Drive module selection design, and control core module selection design. This paper analyzes the design requirements of vibration isolation system control software, selects Windows XPe RTX as the software development environment, designs the overall framework of the control software, and designs the software in detail from the real-time driving module, shared memory module and human-computer interaction module. Finally, the composition and test method of the experimental platform are introduced, and the hardware and software of the controller and control system are tested. The experimental results show that the design of the control system meets the control requirements.
【學(xué)位授予單位】：華中科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2013
【分類號】：TB535.1

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