To satisfy the measuring demands for the micro components of the industry, micro/nano probing systems with various ball tips have been developed. However, most of them cannot be used to measure the real micro geometrical features high precisely because the parameters of the ball tips are not appropriate. The ball tips with a diameter of less than 100 μm, a sphericity and eccentricity of far less than 1 μm are required urgently. A review on the state-of-the-art of ball tips of micro/nano probing ...

【文章頁數(shù)】：9 頁

【文章目錄】：
1 Introduction
2 Material and Application of Ball Tips
    2.1 Ruby
    2.2 Glass Fiber
    2.3 Silicon Nitride
    2.4 Tungsten Carbide
    2.5 Alumina
3 Fabrication Methods of Ball Tip
    3.1 Adhesion Method
    3.2 Material Removal Method
        3.2.1 EDM Combining WEDG with OPED
        3.2.2 Micro-ECM-OPED
    3.3 Fusion Method
        3.3.1 Arc Discharge
        3.3.2 LBM
4 Future Trends and Challenges
5 Conclusions



本文編號：3958717