【摘要】：MOEMS微鏡的驅(qū)動(dòng)裝置是其核心部件,通過不同的微鏡驅(qū)動(dòng)裝置可以實(shí)現(xiàn)對(duì)入射光強(qiáng)度和相位的調(diào)制以及光路的選通。目前主要有壓電驅(qū)動(dòng)、電磁驅(qū)動(dòng)、電熱驅(qū)動(dòng)和靜電驅(qū)動(dòng)等驅(qū)動(dòng)方式。這些驅(qū)動(dòng)方式均需要導(dǎo)線連接、電磁激勵(lì)源,容易引入電磁干擾,并且無(wú)法在獨(dú)立環(huán)境中工作,因此開展利用鑭改性鋯鈦酸鉛(PLZT)陶瓷驅(qū)動(dòng)的光控微鏡及其驅(qū)動(dòng)控制策略的研究具有重要的意義。與傳統(tǒng)微鏡驅(qū)動(dòng)方式相比,PLZT陶瓷驅(qū)動(dòng)的光控微鏡無(wú)需電磁激勵(lì)源,具有非接觸遠(yuǎn)程光控、無(wú)線能量傳輸、無(wú)電磁干擾、驅(qū)動(dòng)清潔等優(yōu)點(diǎn),適于潔凈操作空間及真空等獨(dú)立工作環(huán)境下的遠(yuǎn)程非接觸操作。本文旨在利用PLZT陶瓷的光致特性實(shí)現(xiàn)對(duì)微鏡裝置的非接觸式閉環(huán)控制,分別針對(duì)PLZT陶瓷在微鏡平移和旋轉(zhuǎn)機(jī)構(gòu)中的應(yīng)用設(shè)計(jì)了新型的驅(qū)動(dòng)機(jī)構(gòu),并基于PLZT陶瓷的多物理場(chǎng)耦合模型對(duì)所提出的驅(qū)動(dòng)機(jī)構(gòu)的閉環(huán)伺服控制進(jìn)行理論建模、仿真分析與實(shí)驗(yàn)驗(yàn)證,為光致伸縮智能材料在微驅(qū)動(dòng)工程領(lǐng)域的應(yīng)用提供理論依據(jù)。對(duì)PLZT陶瓷在高能紫外光照射下的反常光生伏特效應(yīng)、熱釋電效應(yīng)、壓電效應(yīng)機(jī)理進(jìn)行分析的基礎(chǔ)上,闡述了 PLZT陶瓷多物理場(chǎng)耦合關(guān)系,并建立了 PLZT陶瓷光照階段與光停階段的多物理場(chǎng)耦合數(shù)學(xué)模型。通過對(duì)光控微鏡各組成結(jié)構(gòu)的選型進(jìn)行分析與討論,確定了光控微鏡的整體設(shè)計(jì)方案。對(duì)微鏡平移機(jī)構(gòu)的剛度、實(shí)際位移放大倍數(shù)、固有頻率等進(jìn)行分析,基于分析結(jié)果確定了相關(guān)尺寸參數(shù),并利用有限元對(duì)微鏡平移機(jī)構(gòu)進(jìn)行了力學(xué)分析;推導(dǎo)了光電-靜電復(fù)合驅(qū)動(dòng)旋轉(zhuǎn)機(jī)構(gòu)的旋轉(zhuǎn)角度,并分析了旋轉(zhuǎn)角度與PLZT陶瓷光生電壓之間的關(guān)系�；赑LZT陶瓷的多物理場(chǎng)耦合模型,分別推導(dǎo)PLZT陶瓷光致微位移閉環(huán)控制、PLZT/PVDF層合懸臂梁復(fù)合驅(qū)動(dòng)機(jī)構(gòu)撓度閉環(huán)控制以及PLZT陶瓷光生電壓閉環(huán)控制理論模型。并利用ON-OFF控制策略,在Matlab軟件中對(duì)所提出驅(qū)動(dòng)機(jī)構(gòu)進(jìn)行數(shù)值仿真分析。仿真結(jié)果表明,通過對(duì)PLZT陶瓷以及基于PLZT陶瓷的新型復(fù)合驅(qū)動(dòng)機(jī)構(gòu)實(shí)施ON-OFF控制策略,能夠?qū)崿F(xiàn)對(duì)光控微鏡驅(qū)動(dòng)裝置的閉環(huán)伺服控制。分別針對(duì)PLZT陶瓷的光致微位移閉環(huán)伺服控制、PLZT/PVDF層合懸臂梁復(fù)合驅(qū)動(dòng)機(jī)構(gòu)的撓度閉環(huán)控制以及PLZT陶瓷的光生電壓閉環(huán)控制開展了實(shí)驗(yàn)研究。實(shí)驗(yàn)結(jié)果表明,單片式PLZT陶瓷的光致形變和光生電壓可以通過ON-OFF控制策略實(shí)現(xiàn)較高精度的動(dòng)態(tài)控制,PLZT/PVDF層合懸臂梁復(fù)合驅(qū)動(dòng)機(jī)構(gòu)可以獲得較大的輸出位移,從而驗(yàn)證了本文所提出的控制策略的有效性,證實(shí)了新型光控復(fù)合驅(qū)動(dòng)方式的可行性。
[Abstract]:The driving device of MOEMS micromirror is its core component. The intensity and phase of incident light can be modulated and the optical path can be switched by different driving devices of micromirror. At present, there are piezoelectric drive, electromagnetic drive, electrothermal drive and electrostatic drive and other driving methods. All of these drives require wire connections, electromagnetic excitation sources, easy introduction of electromagnetic interference, and inability to work in an independent environment. Therefore, it is of great significance to study the light-controlled micromirror driven by lanthanum modified lead zirconate titanate (PLZT) ceramics and its driving control strategy. Compared with the traditional driving mode of micromirror, PLZT ceramic driven light-controlled micromirror has the advantages of non-contact remote optical control, wireless energy transmission, no electromagnetic interference, clean driving and so on. Suitable for remote non-contact operation in clean operating space and vacuum. The purpose of this paper is to realize the non-contact closed-loop control of micromirror devices by using the photoinduced characteristics of PLZT ceramics. A new type of driving mechanism is designed for the applications of PLZT ceramics in the micromirror translation and rotation mechanisms, respectively. Based on the multi-physical field coupling model of PLZT ceramics, the closed-loop servo control of the driving mechanism is theoretically modeled, simulated and verified by experiments, which provides a theoretical basis for the application of photostrictive smart materials in the field of micro-drive engineering. Based on the analysis of anomalous photovolt effect, pyroelectric effect and piezoelectric effect mechanism of PLZT ceramics irradiated by high energy ultraviolet light, the coupling relationship of PLZT ceramics with multiple physical fields is described. The multi-physical field coupling mathematical model of PLZT ceramics during illumination and light stoppage is established. Based on the analysis and discussion of the structure selection of the light-controlled micromirror, the overall design scheme of the light-controlled micromirror is determined. The stiffness, the actual displacement magnification and the natural frequency of the micromirror translation mechanism are analyzed. Based on the analysis results, the relevant dimension parameters are determined, and the mechanical analysis of the micro mirror translation mechanism is carried out by using the finite element method. The rotation angle of optoelectronic electrostatic compound drive rotating mechanism is deduced, and the relationship between rotation angle and photogenerated voltage of PLZT ceramics is analyzed. Based on the multi-physical field coupling model of PLZT ceramics, the theoretical models of PLZT ceramic photoinduced micro-displacement closed-loop control, PLZT/PVDF laminated cantilever composite driving mechanism deflection closed-loop control and PLZT ceramics photogenerated voltage closed-loop control are derived respectively. Using ON-OFF control strategy, numerical simulation analysis of the proposed drive mechanism is carried out in Matlab software. The simulation results show that the closed-loop servo control of the light-controlled micromirror drive device can be realized by implementing the ON-OFF control strategy for the PLZT ceramics and the new compound drive mechanism based on PLZT ceramics. In this paper, the photoinduced micro-displacement closed-loop servo control of PLZT ceramics, the deflection closed-loop control of PLZT/PVDF laminated cantilever composite drive mechanism and the photovoltage closed-loop control of PLZT ceramics are studied. The experimental results show that the photoinduced deformation and photogenerated voltage of monolithic PLZT ceramics can be controlled dynamically by ON-OFF control strategy, and the PLZT/PVDF laminated cantilever composite drive mechanism can obtain larger output displacement. The effectiveness of the proposed control strategy is verified, and the feasibility of the new optically controlled compound drive is verified.
【學(xué)位授予單位】：南京理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TH-39

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本文編號(hào)：2396142