【摘要】：精密定位技術(shù)是提升國(guó)家核心競(jìng)爭(zhēng)力和綜合國(guó)力的戰(zhàn)略選擇,而微定位平臺(tái)的控制系統(tǒng)設(shè)計(jì)是精密定位技術(shù)的關(guān)鍵部分。分布柔度式平面柔順機(jī)構(gòu)作為一種新型的微定位機(jī)構(gòu),其不僅具有柔性機(jī)構(gòu)無(wú)摩擦磨損、無(wú)運(yùn)動(dòng)間隙和免裝配潤(rùn)滑的優(yōu)點(diǎn),還具有并聯(lián)機(jī)構(gòu)多運(yùn)動(dòng)維度、穩(wěn)定高和承載能力強(qiáng)的特性�；诜植既岫仁狡矫嫒犴槞C(jī)構(gòu)的微定位平臺(tái)運(yùn)動(dòng)精度高、行程大、動(dòng)態(tài)響應(yīng)快、體積小,并且可以達(dá)到亞微米級(jí)的定位精度和納米級(jí)的分辨率。因而,分布柔度式平面柔順機(jī)構(gòu)可廣泛應(yīng)用于精密工程、微納制造、微電子技術(shù)等尖端領(lǐng)域,其運(yùn)動(dòng)特性分析和控制系統(tǒng)設(shè)計(jì)已成為國(guó)內(nèi)外學(xué)者關(guān)注的焦點(diǎn)。本文以分布柔度式平面柔順機(jī)構(gòu)為研究對(duì)象,主要探討了機(jī)構(gòu)的運(yùn)動(dòng)學(xué)特性和動(dòng)力學(xué)特性,分析了機(jī)構(gòu)控制器的設(shè)計(jì)及其控制系統(tǒng)的建立,最后通過(guò)實(shí)驗(yàn)測(cè)試驗(yàn)證了機(jī)構(gòu)建模和理論分析的正確性。具體的研究?jī)?nèi)容如下:(1)基于分布柔度式平面柔順機(jī)構(gòu)的矢量同構(gòu)模型,采用微位移法對(duì)機(jī)構(gòu)進(jìn)行運(yùn)動(dòng)學(xué)分析,得到了機(jī)構(gòu)的輸入輸出Jacobian矩陣。通過(guò)仿真得到了機(jī)構(gòu)的位移/轉(zhuǎn)動(dòng)云圖和應(yīng)力云圖,驗(yàn)證了機(jī)構(gòu)的運(yùn)動(dòng)特性和Jacobian矩陣的有效性。(2)運(yùn)用拉格朗日方程(Lagrange法),建立了分布柔度式平面柔順機(jī)構(gòu)的剛體動(dòng)力學(xué)模型;基于梁?jiǎn)卧Ｐ秃瓦\(yùn)動(dòng)彈性動(dòng)力學(xué)原理(KED法),建立了分布柔度式平面柔順機(jī)構(gòu)的彈性動(dòng)力學(xué)模型。在此基礎(chǔ)上,對(duì)機(jī)構(gòu)進(jìn)行模態(tài)分析,得到了機(jī)構(gòu)的三階固有頻率和振型圖,驗(yàn)證了機(jī)構(gòu)動(dòng)力學(xué)模型的有效性。(3)基于分布柔度式平面柔順機(jī)構(gòu)的彈性動(dòng)力學(xué)方程和濾波器,設(shè)計(jì)了一種滑模變結(jié)構(gòu)控制器(SMC),并構(gòu)造了李雅普諾夫(Lyapunov)函數(shù)來(lái)證明該控制器的穩(wěn)定性。結(jié)合S-Function函數(shù)和Simulink框圖,建立了機(jī)構(gòu)的控制系統(tǒng)。通過(guò)仿真,得到了機(jī)構(gòu)的位移軌跡跟蹤曲線及其誤差曲線。(4)對(duì)分布柔度式平面柔順機(jī)構(gòu)進(jìn)行實(shí)驗(yàn)測(cè)試,得到了機(jī)構(gòu)輸出耦合、定位精度和運(yùn)動(dòng)軌跡三個(gè)方面的實(shí)驗(yàn)數(shù)據(jù),并將其與理論計(jì)算值進(jìn)行比較,分析了數(shù)據(jù)誤差產(chǎn)生的原因,驗(yàn)證了機(jī)構(gòu)理論分析的正確性。
[Abstract]:Precision positioning technology is a strategic choice to enhance national core competitiveness and comprehensive national strength, and the control system design of micro-positioning platform is the key part of precision positioning technology. As a new type of micro-positioning mechanism, the distributed flexibility planar compliant mechanism not only has the advantages of no friction and wear, no movement clearance and no assembly lubrication, but also has multiple kinematic dimensions of parallel mechanism. High stability and high bearing capacity. The micro-positioning platform based on distributed flexibility planar compliant mechanism has high motion accuracy, large stroke, fast dynamic response, small volume, and can achieve sub-micron positioning accuracy and nanoscale resolution. Therefore, the distributed flexibility planar compliant mechanism can be widely used in the fields of precision engineering, micro / nano manufacturing, microelectronics technology and so on. The analysis of its motion characteristics and the design of its control system have become the focus of attention of scholars at home and abroad. In this paper, the kinematic and dynamic characteristics of the distributed compliance planar compliant mechanism are discussed, and the design of the controller and the establishment of the control system are analyzed. Finally, the correctness of mechanism modeling and theoretical analysis is verified by experimental test. The specific research contents are as follows: (1) based on the vector isomorphism model of the distributed compliance planar compliant mechanism, the kinematics analysis of the mechanism is carried out by using the micro-displacement method, and the input and output Jacobian matrix of the mechanism is obtained. The displacement / rotation cloud diagram and stress cloud diagram of the mechanism are obtained by simulation. The kinematic characteristics of the mechanism and the validity of the Jacobian matrix are verified. (2) the Lagrangian equation (Lagrange method) is used. The rigid-body dynamics model of the planar compliant mechanism with distributed flexibility is established. Based on the beam element model and the principle of kinematic elastodynamics (KED method), the elastic dynamic model of the distributed flexibility planar compliant mechanism is established. On this basis, the modal analysis of the mechanism is carried out, and the third order natural frequency and mode diagram of the mechanism are obtained, which verifies the validity of the dynamic model of the mechanism. (3) based on the elastic dynamics equation and filter of the distributed compliance type planar compliant mechanism, A sliding mode variable structure controller (SMC),) is designed and the Lyapunov (Lyapunov) function is constructed to prove the stability of the controller. Combined with S-Function function and Simulink block diagram, the control system of the mechanism is established. Through simulation, the displacement trajectory tracking curve and its error curve of the mechanism are obtained. (4) the experimental data of the distributed flexibility planar compliant mechanism are obtained in three aspects: output coupling, positioning accuracy and motion track. Compared with the theoretical calculation, the reason of the data error is analyzed, and the correctness of the mechanism theory analysis is verified.
【學(xué)位授予單位】：江西理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TH112

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本文編號(hào)：2321993