本文選題：微機(jī)電系統(tǒng)(MEMS)　切入點(diǎn)：激光　出處：《浙江大學(xué)》2016年博士論文　論文類型：學(xué)位論文

【摘要】：隨著微機(jī)電系統(tǒng)不斷地朝著小型化和系統(tǒng)功能集成化方向發(fā)展,微驅(qū)動(dòng)技術(shù)獲得了巨大的關(guān)注和發(fā)展,相繼涌現(xiàn)了靜電、電磁、壓電、電熱、光熱型微驅(qū)動(dòng)技術(shù),其中光熱微驅(qū)動(dòng)器技術(shù)結(jié)構(gòu)簡(jiǎn)單、操控簡(jiǎn)便、驅(qū)動(dòng)力大、可實(shí)現(xiàn)遠(yuǎn)程控制、易于小型化和集成化,具有廣泛的應(yīng)用前景。通常光熱微驅(qū)動(dòng)器采用光刻膠,高密度聚乙烯等聚合物作為驅(qū)動(dòng)材料,但這些聚合物材料在結(jié)構(gòu)強(qiáng)度、耐熱性、可靠性、以及動(dòng)態(tài)響應(yīng)等方面表現(xiàn)不理想。為此,本文提出了以金屬作為驅(qū)動(dòng)材料的新型光熱微驅(qū)動(dòng)器,克服聚合物光熱微驅(qū)動(dòng)器的這些局限性。利用LIGA技術(shù)(一種X射線深度光刻技術(shù))研制了三角形、棘輪棘爪光熱微馬達(dá)和蠕動(dòng)式爬行機(jī)構(gòu)等多種金屬光熱微驅(qū)動(dòng)機(jī)構(gòu),并對(duì)其進(jìn)行了理論和實(shí)驗(yàn)研究。本文對(duì)光熱膨脹機(jī)制和光熱徽驅(qū)動(dòng)技術(shù)開展了系統(tǒng)的研究,建立了光熱徽膨脹臂在激光作用下受熱膨脹伸長(zhǎng)的穩(wěn)態(tài)和瞬態(tài)模型。首先研究了光熱膨脹效應(yīng)中涉及到的激光吸收、熱傳導(dǎo)、對(duì)流換熱、熱輻射和熱膨脹等物理現(xiàn)象,初步討論了他們?cè)诠鉄崤蛎浶?yīng)中的作用。在此基礎(chǔ)上,建立了光熱熱膨脹效應(yīng)的穩(wěn)態(tài)模型和瞬態(tài)模型,以微膨脹臂為例,推導(dǎo)了穩(wěn)態(tài)和瞬態(tài)的溫度場(chǎng)分布和形變計(jì)算公式,計(jì)算了在連續(xù)或脈沖激光作用下微膨脹臂的溫度分布與形變量。設(shè)計(jì)并研制了多種金屬光熱徽驅(qū)動(dòng)機(jī)構(gòu)。在光熱膨脹理論模型的基礎(chǔ)上,設(shè)計(jì)了多種光熱微驅(qū)動(dòng)器：三角形光熱微驅(qū)動(dòng)器、棘輪棘爪光熱微馬達(dá),蠕動(dòng)光熱爬行機(jī)構(gòu),并利用LIGA技術(shù),在北京同步輻射光源LIGA線站制備了這些微驅(qū)動(dòng)器。搭建并優(yōu)化了光熱徽驅(qū)動(dòng)器的驅(qū)動(dòng)控制與顯微觀測(cè)系統(tǒng)。驅(qū)動(dòng)控制與顯微觀測(cè)系統(tǒng)系統(tǒng)由驅(qū)動(dòng)控制模塊與顯微觀測(cè)模塊構(gòu)成,驅(qū)動(dòng)控制模塊由激光器和調(diào)節(jié)光路組成,能夠調(diào)節(jié)激光波形并準(zhǔn)確將激光匯聚在驅(qū)動(dòng)位置實(shí)現(xiàn)微驅(qū)動(dòng)；顯微觀測(cè)模塊包含驅(qū)動(dòng)監(jiān)控功能與驅(qū)動(dòng)分析功能,基于圖像匹配算法的軟件能夠分析視頻準(zhǔn)確描繪微驅(qū)動(dòng)器的驅(qū)動(dòng)曲線。研究了一種三角形金屬光熱徽驅(qū)動(dòng)器的驅(qū)動(dòng)特性。首先闡述了三角形光熱微驅(qū)動(dòng)器的結(jié)構(gòu)與驅(qū)動(dòng)原理,接著利用有限元分析的方法分析了在連續(xù)激光或脈沖激光作用下,微驅(qū)動(dòng)器所產(chǎn)生的瞬態(tài)溫度分布和膨脹伸長(zhǎng),研究了在不同頻率激光作用下,微驅(qū)動(dòng)器的動(dòng)態(tài)響應(yīng)特性,并利用金屬鎳制備的微驅(qū)動(dòng)器開展了相應(yīng)的實(shí)驗(yàn)研究,結(jié)果與理論相吻合。最后,分析了材料性能和幾何尺寸等關(guān)鍵參數(shù)對(duì)光熱微驅(qū)動(dòng)器驅(qū)動(dòng)性能的影響和貢獻(xiàn)。開展了新型棘輪棘爪光熱馬達(dá)的理論和實(shí)驗(yàn)研究,提出了一種蠕動(dòng)光熱爬行機(jī)構(gòu)。首先詳細(xì)闡述了棘輪棘爪光熱馬達(dá)的機(jī)械結(jié)構(gòu)和驅(qū)動(dòng)機(jī)制,能夠?qū)⒐鉄崤蛎浱峁┑闹本�往復(fù)驅(qū)動(dòng)轉(zhuǎn)變?yōu)辇X輪轉(zhuǎn)動(dòng),然后用LIGA技術(shù)制備了光熱馬達(dá),并開展了實(shí)驗(yàn)研究,初步驗(yàn)證了將光能直接轉(zhuǎn)變?yōu)檗D(zhuǎn)動(dòng)的機(jī)械能輸出的構(gòu)想,開創(chuàng)了光能利用的新思路。最后,設(shè)計(jì)了一種能夠在激光驅(qū)動(dòng)下整體向前步進(jìn)蠕動(dòng)的光熱爬行機(jī)構(gòu)。
[Abstract]:With the development of microelectromechanical system constantly towards miniaturization and integrated development, micro drive technology has obtained the enormous attention and development have emerged, electrostatic, electromagnetic, piezoelectric, electric, thermal micro drive technology, the thermal micro actuator technology has the advantages of simple structure, convenient operation, large driving force, can be realized remote control, easy miniaturization and integration, and has wide application prospect. Usually photothermal microactuators using the photoresist, high density polyethylene polymer as the driving materials, but these polymer materials in structural strength, heat resistance, reliability, and dynamic response performance is not ideal. Therefore, as the metal is put forward in this paper. A new thermal driven micro actuator materials, polymer to overcome these limitations of photothermal micro actuators. By using the technology of LIGA (a deep X ray lithography) Research Triangle, ratchet and pawl Photo thermal micro motor and peristaltic creeping mechanism of various metals such as photothermal micro actuators, and has carried on the theoretical and experimental research. The photo thermal expansion mechanism and thermal Huizhou driving technology to carry out a systematic study on the thermal expansion arm, the establishment of Huizhou under the action of laser thermal expansion of the steady and transient model. Firstly, elongation laser photothermal involves the absorption and expansion effect in heat conduction, heat convection, heat radiation and other physical phenomena and thermal expansion, discussed them in the photo thermal expansion effect. On this basis, the establishment of steady-state model and transient model of photothermal thermal expansion effect, the micro expansion arm as an example, calculation the formula of temperature field distribution and deformation of steady state and transient state, calculate the temperature distribution in continuous or micro expansion arm with variable shaped laser pulses. Design and development of a variety of metal thermal emblem driving machine Based on photo thermal expansion structure. On the theoretical model, design a variety of photothermal micro actuators: Triangle photothermal micro actuators, micro thermal ratchet motor, thermal peristaltic crawling mechanism, and the use of LIGA technology in Beijing synchrotron radiation source LIGA lines of these micro drive station was set up. The preparation and optimization of the drive control and microscopic observation system the emblem of photothermal drive. Driving control and microscopic observation system by the drive control module and micro observation module, drive control module is composed of laser and light path adjustment, can adjust the laser waveform and accurate laser gathering in the driving position to realize micro drive; micro observation module includes a drive control function and driving function analysis, image matching algorithm the software can accurately describe the video analysis of driving curve of micro actuator based on research. A triangular metal thermal drive drive emblem Dynamic characteristic. First describes the structure and driving principle of triangle photothermal microactuators, then using finite element method analysis of the continuous laser or pulsed laser irradiation, produced by the micro drive transient temperature distribution and expansion elongation, were investigated in different frequency excitation light under the action of dynamic response of the micro actuator, and the use of micro drive metal nickel prepared and carried out the corresponding experimental studies, the results coincide with theoretical analysis. Finally, the influence of key parameters, material properties and geometry of photothermal micro actuators driving performance and contribution. The theoretical and experimental study on new type thermal ratchet pawl motor, a peristaltic creeping mechanism of the thermal put forward. First elaborated the mechanical structure and drive motor thermal ratchet pawl mechanism, to provide the photo thermal expansion into linear reciprocating drive gear, Then use the LIGA technique to prepare thermal motor, and the experimental study was carried out, a preliminary validation of the idea of energy directly to output is a rotating machinery, creating new ideas of light utilization. Finally, a design can drive the photothermal crawling mechanism overall step forward peristalsis in the laser.

【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2016
【分類號(hào)】：TH-39

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