本文關鍵詞： 并聯(lián)機構 柔性鉸鏈 靜力分析 模態(tài)分析 3-PSR-V 影響系數(shù) 剛?cè)狁詈戏抡?MATLAB-SimMechanics仿真　出處：《浙江大學》2017年碩士論文　論文類型：學位論文

【摘要】：在機器人技術已經(jīng)深入研究并被廣泛應用的今天,并聯(lián)機構做為機器人技術的一個重要分支也得到了很多學者的關注、研究并取得了豐碩的成果,并聯(lián)機構以其獨特的性能被廣泛的應用于位姿調(diào)節(jié)裝置中。尤其在精密位姿調(diào)節(jié)領域,并聯(lián)機構結(jié)合微位移技術產(chǎn)生出巨大的應用價值。本文基于浸沒式光刻機中浸沒單元工作過程中位姿調(diào)節(jié)的需求,在對3自由度并聯(lián)機構進一步研究的基礎上,結(jié)合柔性鉸鏈技術,設計出一種能實現(xiàn)空間3自由度位姿調(diào)節(jié)功能的空間全柔性鉸鏈機構,并對其性能做了一定的探究。本文具體內(nèi)容包括以下幾個方面:1)應用機構運動影響系數(shù)理論,對三自由度并聯(lián)機構3-PSR-V的速度分析、加速度分析、動力分析做了一定的探究,推導出了三自由度并聯(lián)機構3-PSR-V相應構件的速度、加速度、移動副受力的表達式。2)基于工程實際需求,應用MATLAB對不同連桿尺寸下俯仰角Rx和側(cè)翻角Ry的范圍大小進行了詳細的討論并在此基礎上確定了連桿的實際長度;建立了三自由度并聯(lián)機構3-PSR-V的SimMechanics模型,應用簡單的三自由度并聯(lián)機構開環(huán)控制策略對SimMechanics模型進行了仿真,得到了三自由度并聯(lián)機構3-PSR-V各運動副相關的運動參數(shù)變化曲線圖和力學參數(shù)變化曲線圖。3)基于直圓型柔性鉸鏈的剛度模型,結(jié)合MATLAB仿真數(shù)據(jù),計算出了柔性球副、柔性轉(zhuǎn)動副、連桿的結(jié)構設計參數(shù),設計出了包含柔性轉(zhuǎn)動副、柔性球副、連桿等結(jié)構的柔性連桿;并通過ANSYS仿真分析,驗證了全柔性連桿結(jié)構設計的合理性。4)基于工程實際需求,在柔性連桿設計的基礎上,設計了類似于三自由度并聯(lián)機構3-PSR-V的空間全柔性并聯(lián)機構,并對其做了靜力分析和模態(tài)分析;應用ADAMS分別對空間全柔性并聯(lián)機構為多剛體和剛?cè)狁詈蟽煞N系統(tǒng)時進行了動力學仿真,分析兩種系統(tǒng)中的仿真結(jié)果表明,設計滿足實際工程需求,并得出在小轉(zhuǎn)角情況下,設計的空間全柔性并聯(lián)機構可以等效為三自由度并聯(lián)機構3-PSR-V的結(jié)論。5)基于靜力分析和動力學分析的結(jié)果,加工出了三自由度空間全柔性并聯(lián)機構驗證樣機,進行了驗證實驗,通過對實驗數(shù)據(jù)處理并對比剛?cè)狁詈戏抡娼Y(jié)果,得出了實驗樣機與設計比較符合,所設計的空間全柔性并聯(lián)機構是合理的結(jié)論。
[Abstract]:Nowadays, the robot technology has been deeply studied and widely used. As an important branch of robot technology, parallel mechanism has also been paid attention by many scholars, and has achieved fruitful results. The parallel mechanism is widely used in the position and attitude adjustment devices for its unique performance, especially in the field of precision position and attitude adjustment. Parallel mechanism combined with micro-displacement technology has great application value. Based on the need of position and attitude adjustment in the working process of immersion unit in immersion lithography, this paper further studies the 3-DOF parallel mechanism. Based on the flexible hinge technology, a fully flexible spatial hinge mechanism is designed, which can adjust the position and attitude of three degrees of freedom in space. The specific contents of this paper include the following aspects: 1) apply the theory of kinematic influence coefficient to analyze the speed of 3-PSR-V of 3-DOF parallel mechanism. Acceleration analysis, dynamic analysis has made a certain exploration, deduced the 3-PSR-V parallel mechanism corresponding components of the speed, acceleration, moving pair force expression. 2) based on the actual engineering requirements. The range of pitch angle Rx and roll angle Ry under different connecting rod sizes is discussed in detail by using MATLAB and the actual length of connecting rod is determined on this basis. The SimMechanics model of 3-PSR-V parallel mechanism with three degrees of freedom is established. A simple open-loop control strategy of 3-DOF parallel mechanism is used to simulate the SimMechanics model. The stiffness model of 3-PSR-V parallel mechanism based on straight circular flexure hinge is obtained. Based on the simulation data of MATLAB, the structural design parameters of flexible ball pair, flexible rotation pair and connecting rod are calculated, and flexible connecting rod with flexible rotation pair, flexible ball pair and connecting rod is designed. And through the ANSYS simulation analysis, it is verified that the design of fully flexible connecting rod structure is reasonable. 4) based on the actual engineering requirements, on the basis of flexible connecting rod design. The spatial fully flexible parallel mechanism similar to 3-PSR-V is designed, and the static analysis and modal analysis are done. The dynamic simulation of space fully flexible parallel mechanism with multi-rigid body and rigid-flexible coupling is carried out by using ADAMS. The simulation results of the two systems show that the design meets the practical engineering requirements. It is concluded that the designed spatial fully flexible parallel mechanism can be equivalent to 3-PSR-V parallel mechanism with three degrees of freedom under the condition of small rotation angle. 5) based on the results of static analysis and dynamic analysis. A three-degree-of-freedom spatial fully flexible parallel mechanism verification prototype is processed and verified. By processing the experimental data and comparing the results of rigid-flexible coupling simulation, the experimental prototype is in good agreement with the design. The designed spatial fully flexible parallel mechanism is a reasonable conclusion.
【學位授予單位】：浙江大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TH112

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本文編號：1482023