發(fā)布時間：2019-05-06 06:04

【摘要】：采用電子束蒸鍍工藝制備氧化鈣摻雜氧化鎂復合介質保護膜并深入分析了制備溫度對該復合保護膜透過率及二次電子發(fā)射效率的影響。實驗表明,高溫制備能夠使復合薄膜表面形貌更為致密,結晶粒徑增加,薄膜的透過率和發(fā)光效率提高。當制備溫度為300℃時,復合薄膜的形貌更為致密平整,裕度從25V增加到32V,發(fā)光效率從1.70lm/W提高到1.91lm/W,提高了12.35%。
[Abstract]:Calcium oxide doped magnesium oxide composite dielectric protective film was prepared by electron beam evaporation and the effect of preparation temperature on the transmittance and secondary electron emission efficiency of the composite protective film was analyzed. The experimental results show that the surface morphology of the composite films is denser, the crystal size is increased, and the transmittance and luminous efficiency of the composite films are improved by high temperature preparation. When the preparation temperature is 300 鈩，

本文編號：2469943