本文選題：主動氣浮減振器　切入點：主被動混合減振系統　出處：《哈爾濱工業(yè)大學》2014年碩士論文　論文類型：學位論文

【摘要】：隨著精密制造和加工、精密光電裝備以及航空航天等相關領域的發(fā)展，人們對系統結構的穩(wěn)定性和測量加工的精度提出更嚴格和苛刻的要求。而限制結構穩(wěn)定性和系統精度提高的關鍵因素就是振動干擾的影響，特別是一些低頻微振動的影響。低頻微振動的影響已經成為制約很多尖端科技發(fā)展的瓶頸。針對這種情況，本課題提出了一種基于氣浮支承結構的主動減振系統（本文中簡稱為主動氣浮減振系統）。該系統可以廣泛應用于精密加工車床，高精度測量系統和微電子加工設備等對振動敏感的尖端設備和系統。 該主動氣浮減振系統屬于一種主被動混合減振系統。其中被動氣浮結構主要由空氣彈簧和靜壓氣浮兩部分組成，兩者相互配合可以實現系統的非接觸式支承。這種結構是一種剛度極小的被動減振結構，可以高效地抑制來自于環(huán)境的干擾。但這種結構也存在一些問題：系統的減振效果往往受結構制約，且對于負載本身產生的振動干擾抑制能力較弱。針對這種情況，該主動氣浮減振系統在被動減振結構抑制環(huán)境振動干擾的基礎上設計基于音圈電機的主動減振單元，進一步提升系統減振性能。 本課題首先系統地介紹了主動氣浮減振器的結構組成和功能。利用理論推導的方法，分析主動氣浮減振器的結構特點，并建立減振器多自由度的模型。其次，根據主動氣浮減振器結構特點和功能要求，為其定位系統和減振系統分別設計合適的控制方法。其中定位系統選用氣路單元初步定位和電機定位單元精確定位相配合的控制方法；而減振系統則使用了主動阻尼和負剛度復合型控制方法。再次，在該主動氣浮減振系統在光刻機系統中的應用背景下，研究如何聯合使用多個減振器實現系統多自由度的減振控制目的，并針對多自由度間耦合情況設計了適用于六自由度減振控制的算法和控制系統。 最后，在光刻機系統中搭建實驗平臺，進行主被動減振系統對比實驗和系統多自由度減振性能測試。實驗結果表明：系統加入主動之后，減振性能得到明顯加強，其中系統時域振動速度幅值和固有頻率分別減低了約42%和16%。另一方面，實驗證明該主動氣浮減振系統能夠有效抑制系統多個自由度的振動干擾，特別是高頻段（10Hz以上）的振動干擾，其抑制效果甚至可以達到80%以上。
[Abstract]:With the development of precision manufacturing and processing, precision optoelectronic equipment, aerospace and other related fields, The stability of the system structure and the precision of measurement and processing are required more strictly and harshly. The key factor that limits the stability of the structure and the improvement of the precision of the system is the effect of vibration interference. Especially the influence of some low-frequency micro-vibration. The low-frequency micro-vibration has become the bottleneck restricting the development of many cutting-edge science and technology. In this paper, an active vibration absorption system based on air bearing structure is proposed. The system can be widely used in precision machining lathe. High-precision measurement systems and micro-electronic processing equipment and so on sensitive to vibration-sensitive sophisticated equipment and systems. The active air flotation damping system belongs to an active and passive hybrid vibration absorption system, in which the passive air floating structure is mainly composed of two parts: air spring and static pressure air floatation. This kind of structure is a kind of passive vibration absorption structure with minimal stiffness. It can restrain the disturbance from the environment efficiently. But there are some problems in this kind of structure: the damping effect of the system is often restricted by the structure, and the ability to suppress the vibration disturbance caused by the load itself is weak. Based on the passive vibration absorption structure, the active vibration reduction unit based on the voice coil motor is designed to further improve the performance of the system. In this paper, the structure and function of the active air flotation damper are systematically introduced. The structural characteristics of the active air flotation damper are analyzed by using the method of theoretical derivation, and the model of multiple degrees of freedom of the shock absorber is established. According to the structural characteristics and functional requirements of active air flotation shock absorber, Suitable control methods are designed for the positioning system and the damping system respectively, in which the control method of the initial positioning of the gas path unit and the precise positioning of the motor positioning unit is used in the positioning system. The active damping and negative stiffness composite control methods are used in the vibration control system. Thirdly, in the background of the application of the active air flotation vibration control system in the lithography system, This paper studies how to use multiple vibration absorbers to achieve the purpose of vibration control of multi-degree-of-freedom system, and designs an algorithm and control system suitable for six-degree-of-freedom vibration reduction control according to the coupling between multi-degrees of freedom. Finally, the experiment platform is built in the lithography system, and the contrast experiment of the active and passive vibration absorption system and the vibration absorption performance test of the system with multiple degrees of freedom are carried out. The experimental results show that the vibration absorption performance of the system is obviously enhanced after the active addition of the system. The amplitude and natural frequency of the time-domain vibration velocity are reduced by about 42% and 16 respectively. On the other hand, the experimental results show that the active air-floatation damping system can effectively suppress the vibration interference of the system with multiple degrees of freedom. Especially in the high frequency band (above 10 Hz), the suppression effect of vibration interference can even reach more than 80%.
【學位授予單位】：哈爾濱工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2014
【分類號】：TH703.3;TB535.1

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本文編號：1618044